CHEE 543. Plasma Engineering.
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CHEE 543
Plasma Engineering.
Credits: 3
Offered by: Chemical Engineering (Faculty of Engineering)
This course is not offered this catalogue year.
Description
Description of the plasma state and parameters, plasma generation methods, and of the related process control and instrumentation. Electrical breakdown in gases and a series of discharge models are covered. Plasma processing applications such as PVD, PECVD, plasma polymerisation and etching, environmental applications, nanoparticle synthesis, spraying and sterilization are treated.
- (3-1-5)
- Prerequisites: CHEE 220 and CHEE 314 or equivalent.
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