MECH 553. Design and Manufacture of Microdevices.
Credits: 3
Offered by: Mechanical Engineering (Faculty of Engineering)
This course is not offered this catalogue year.
Description
Introduction to microelectromechanical systems (MEMS). Micromachining techniques (thin-film deposition; lithography; etching; bonding). Microscale mechanical behaviour (deformation and fracture; residual stresses; adhesion; experimental techniques). Materials- and process-selection. Process integration. Design of microdevice components to meet specified performance and reliability targets using realistic manufacturing processes.
- (3-0-6)
- Prerequisites: MECH 309, MECH 321, (MECH 315 or MECH 419)