MIME 570. Micro- and Nano-Fabrication Fundamentals.
Credits: 3
Offered by: Mining & Materials Engineering (Faculty of Engineering)
This course is not offered this catalogue year.
Description
Fundamentals of micro- and nano-fabrication technologies. Lithographic, etching, deposition, and implantation and various control parameters of these processes and their resulting effects on structure, materials quality, and conformality.
- (3-0-6)
- Prerequisite: MIME 467 or ECSE 330 or equivalent, or permission of instructor